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Silicon etch using SF6/C4F8/Ar gas mixtures - Scitation
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Silicon etch using SF6/C4F8/Ar gas mixtures - Scitation
Website URL:
http://scitation.aip.org/content/avs/journal/jvsta/32/4/10.1116/1.4880800
Category:
Agriculture Projects
While plasmas using mixtures of SF6, C4F8, and Ar are widely used in deep silicon etching, very few studies have linked the discharge parameters to etching results.
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